Two-dimensional radio-frequency methane plasma simulation: comparison with experiments

IEEE Transactions on Plasma Science

Volumn 27, Issue 5, 1999, Pages 1476-1486

  Bera, Kallol ^a   Yi, Jeong W ^a   Farouk, Bakhtier ^a   Lee, Young H ^a  

^a Drexel University   (United States)

Author keywords

Chemical vapor deposition; Experiment; Langmuir probe; Methane plasma; Simulation

Indexed keywords

LANGMUIR PROBES; RADIO FREQUENCY PLASMAS;

COMPUTER SIMULATION; ELECTRIC CURRENTS; ELECTRODES; ELECTRONS; GLOW DISCHARGES; MATHEMATICAL MODELS; METHANE; PLASMA DENSITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA PROBES;

PLASMA SIMULATION;

EID: 0033204710     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.799829     Document Type: Article

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