Nanometer scale patterning and pattern transfer on amorphous Si, crystalline Si, and SiO2 surfaces using self-assembled monolayers

Applied Physics Letters

Volumn 70, Issue 12, 1997, Pages 1593-1595

  Wang, Dawen ^a   Thomas, Shawn G ^a   Wang, Kang L ^a   Xia, Younan ^b   Whitesides, George M ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000415927     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118625     Document Type: Article

References (13)

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