Influence of ion energy flux on structure and optical properties of a-C:H thin films

Journal of Applied Physics

Volumn 79, Issue 10, 1996, Pages 7676-7681

  Lee, Jung H ^a   Lee, Young H ^a   Farouk, Bakhtier ^a  

^a Drexel University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001206244     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362432     Document Type: Article

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