Synthesis of amorphous carbon nitride using reactive ion beam sputtering deposition with grazing bombardment

Diamond and Related Materials

Volumn 10, Issue 12, 2001, Pages 2184-2189

  Bell, John ^a   Chen, Zhuping ^a   Olofinjana, Ayo ^a  

^a QUEENSLAND UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Carbon nitride; Characterisation; Ion beam growth; Ion bombardment

Indexed keywords

AMORPHOUS FILMS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITE; INDENTATION; ION BEAM ASSISTED DEPOSITION; RAMAN SPECTROSCOPY; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

REACTIVE ION BEAM SPUTTERING DEPOSITION (RIBSD);

CARBON NITRIDE;

CARBON NITRIDE;

EID: 0035577088     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00505-2     Document Type: Article

References (30)

1. Ion beam deposition and doping of diamond-like materials
2. Structural characterisation of diamond-like carbon films using Raman spectroscopy
3. Analysis of structure and properties of diamond-like carbon films by ion beam deposition