Progress of micro-tribology on micro-electro-mechanical systems

Mocaxue Xuebao/Tribology

Volumn 21, Issue 6, 2001, Pages 494-498

  Deng, Zhao ^a   Rao, Wen Qi ^a   Ren, Tian Hui ^a   Yu, Lai Gui ^a   Liu, Wei Min ^a   Yu, Xin Liang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Lubrication; MEMS; Micro tribology; Surface modification; Ultra thin film

Indexed keywords

LUBRICATION; SURFACE TREATMENT; TRIBOLOGY; ULTRATHIN FILMS;

MICROELECTROMECHANICAL SYSTEMS; MICROTRIBOLOGY; NANOTRIBOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0035502803     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (40)

1. Micromechanical sensors actuators and systems
2. Adhesion and friction issues associated with reliable operation of MEMS
3. Tribology on the macro- to nanoscales of MEMS materials: A review
4. Effect of atmosphere on MEMS operation
5. Performance and reliability of a new MEMS electrostatic lateral output motor
6. The effect of relative humidity on friction and pull-off forces measured on submicron-size asperity arrays
7. Tiny motors making a big noise
8. Surface engineering and microtribology for microelectromechanical systems
9. Nanoscale tribophysics and tribomechanics
10. Nanotribology and nanomechanics of MEMS devices
11. Micro/nanotribology and its applications to magnetic storage devices and MEMS
12. Control tribological and mechanical properties of MEMS surfaces
13. Friction and pull-off force on silicon surface modified by FIB
14. Superlubricity mechanism for micro electro mechanical systems
15. Investigation on microtribological behavior of thin films using friction force microscopy
16. A new approach to measure the friction coefficient of micro journal bearings
17. Micro/nanotribological studies of polysilicon and SiC films for MEMS applications
18. Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices
19. Evaluation of fracture toughness of ultra-thin amorphous carbon coatings deposited by different deposition techniques
20. Measurement of fracture toughness of ultra-thin amorphous carbon films
21. Coating thickness effect on surface damage mode transitions for ion beam assisted carbon nitride coating subject to sliding contact with a spherical diamond
22. Effect of friction cycles on wear particle generation of carbon nitride coating against a spherical diamond
23. Tribology of thin coatings
24. 2 nanoparticle LB film during rubbing process
25. The tribological behavior of LB films of fatty acids and nanoparticles
26. 2 nanoparticles coated with dialkyldithiophosphate
27. Controlling and improving the microtribological properties of Langmuir-Blodgett monolayer films using an external electric field
28. Self-assembled monolayers as anti-stiction coatings for MEMS: Characteristics and recent developments
29. Tribological properties of self-assembled monolayers of fluorocarbon and hydrocarbon thiols and disulfides on Au (111) studied by scanning force microscopy
30. Optimization of lubricants for silica micromotors
31. Tribological application of molecular deposition (MD) films