Superlubricity mechanism for micro electro mechanical systems

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 436-441

  Hirano, Motohisa ^a   Kuwano, Hiroki ^a   Weijtmans, Johan Wilhelm ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FRICTION; MATHEMATICAL MODELS; PRESSURE EFFECTS; SCANNING TUNNELING MICROSCOPY; TRIBOLOGY;

SUPERLUBRICITY MECHANICS; ULTRAHIGH VACUUM SCANNING TUNNELING MICROSCOPY;

MICROELECTROMECHANICAL DEVICES;

EID: 0030685616     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)