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Volumn 66, Issue , 1998, Pages 265-266
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Tribology on the macro- to nanoscales of MEMS materials: A review
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CERAMIC MATERIALS;
FRACTURE TOUGHNESS;
HIGH TEMPERATURE APPLICATIONS;
LUBRICATION;
NANOTECHNOLOGY;
PLASTIC FILMS;
SILICON CARBIDE;
SURFACE ROUGHNESS;
TRIBOLOGY;
WEAR OF MATERIALS;
FRICTION FORCE MICROSCOPY (FFM);
POLYSILICON FILMS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0032287985
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (3)
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References (20)
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