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Diamond and Related Materials

Volumn 10, Issue 9-10, 2001, Pages 1637-1642

Synthesis of highly oriented CVD diamond films by ultra short bias enhanced nucleation step

(4) Barrat, S a Saada, S a Thiebaut, J M a Bauer Grosse, E a

a INSTITUT JEAN LAMOUR (France)

Author keywords

Chemical vapour deposition; Diamond; Hetero epitaxy

Indexed keywords

CRYSTAL ORIENTATION; ION BOMBARDMENT; MICROWAVES; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE TREATMENT;

MICROWAVE PLASMA ASSISTED CHEMICAL VAPOUR DEPOSITION (MPCVD);

DIAMOND FILMS;

DIAMOND;

EID: 0035449776 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(01)00445-9 Document Type: Article

Times cited : (16)

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