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Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 317-321

Ion energy distributions and their evolution during bias-enhanced nucleation of chemical vapor deposition of diamond

(4) Katai Sz a Kovats A a Maros, I a Deak P a

a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; ELECTRIC CURRENTS; ELECTRON ENERGY LEVELS; HYDROGEN; ION BEAMS; MASS SPECTROMETRY; MICROWAVES; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

BIAS-ENHANCED NUCLEATION (BEN); ION-BEAM MASS SPECTROMETRY;

DIAMONDS;

EID: 0033746770 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(99)00216-2 Document Type: Article

Times cited : (23)

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