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Volumn 26, Issue 3, 1998, Pages 255-259

Piezo-Actuated Microtensile Test Apparatus

Author keywords

Closed loop; Displacement; Force; Piezoelectric; Servo; Strain; Stress; Thin film

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; EDDY CURRENTS; FORCE MEASUREMENT; MACHINE DESIGN; PIEZOELECTRIC DEVICES; SENSORS; SERVOMECHANISMS; STRAIN; STRESSES; THIN FILMS;

EID: 0032074545     PISSN: 00903973     EISSN: None     Source Type: Journal    
DOI: 10.1520/jte11999j     Document Type: Article
Times cited : (36)

References (11)
  • 1
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    • Hardwick, D.A.1
  • 3
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    • Mechanical Testing of Thin Films
    • Brotzen, F. R., "Mechanical Testing of Thin Films," International Materials Reviews, Vol. 39, No. 1, 1994, pp. 24-45.
    • (1994) International Materials Reviews , vol.39 , Issue.1 , pp. 24-45
    • Brotzen, F.R.1
  • 4
    • 84972102741 scopus 로고
    • Mechanical Characterization of Thin Films by Micromechanical Techniques
    • July
    • Schweitz, Jan-Ake, "Mechanical Characterization of Thin Films by Micromechanical Techniques," Materials Research Society Bulletin, July 1992, pp. 34-45.
    • (1992) Materials Research Society Bulletin , pp. 34-45
    • Schweitz, J.-A.1
  • 5
    • 0042657765 scopus 로고
    • Vibrating Membrane Elastomer for Reliable Measurement of Mechanical Properties of Metallic Films
    • Feb.
    • Fartash, A., Schuller, I. K., and Grimsditch, M., "Vibrating Membrane Elastomer for Reliable Measurement of Mechanical Properties of Metallic Films," Review of Scientific Instruments, Vol. 62, No. 2, Feb. 1991, pp. 494-501.
    • (1991) Review of Scientific Instruments , vol.62 , Issue.2 , pp. 494-501
    • Fartash, A.1    Schuller, I.K.2    Grimsditch, M.3
  • 7
    • 0028203114 scopus 로고
    • The Elastic Biaxial Modulus of Ag-Pd Multilayered Thin Films Measured Using the Bulge Test
    • Jan.
    • Small, M. K., Daniels, B. J., Clemens, B. B., and Nix, W, D., "The Elastic Biaxial Modulus of Ag-Pd Multilayered Thin Films Measured Using the Bulge Test," Journal of Materials Research, Vol. 9, No. 1, Jan. 1994, pp. 25-30.
    • (1994) Journal of Materials Research , vol.9 , Issue.1 , pp. 25-30
    • Small, M.K.1    Daniels, B.J.2    Clemens, B.B.3    Nix, W.D.4
  • 8
    • 0024608157 scopus 로고
    • The Mechanical Properties of Monocrystalline Nickel Electrodeposits
    • KiM, I., and Weil, R., "The Mechanical Properties of Monocrystalline Nickel Electrodeposits," Thin Solid Films, Vol. 169, 1993, pp. 35-42.
    • (1993) Thin Solid Films , vol.169 , pp. 35-42
    • Kim, I.1    Weil, R.2
  • 10
    • 0027623496 scopus 로고
    • A New Method for Measuring the Strength and Ductility of Thin Films
    • July
    • Read, D. T., and Dally, J. W., "A New Method for Measuring the Strength and Ductility of Thin Films," Journal of Materials Research, Vol. 8, No. 7, July 1993, pp. 1542-1549.
    • (1993) Journal of Materials Research , vol.8 , Issue.7 , pp. 1542-1549
    • Read, D.T.1    Dally, J.W.2
  • 11
    • 0029272622 scopus 로고
    • Fatigue of Microlithographically-Patterned Free-Standing Aluminum Thin Film under Axial Stress
    • March
    • Read, D. T., and Dally, J. W., "Fatigue of Microlithographically-Patterned Free-Standing Aluminum Thin Film Under Axial Stress," Journal of Electronic Packaging, Vol. 117, March 1995, pp. 1-6.
    • (1995) Journal of Electronic Packaging , vol.117 , pp. 1-6
    • Read, D.T.1    Dally, J.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.