Study on the fundamental design issues of micro electromechanical systems (MEMS)

Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

Volumn 36, Issue 7, 2000, Pages 39-42

  Wen, Shizhu ^a   Ding, Jianning ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

MACHINE DESIGN; MICROMACHINING; TRIBOLOGY;

MICROTRIBOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0033712763     PISSN: 05776686     EISSN: None     Source Type: Journal    
DOI: 10.3901/jme.2000.07.039     Document Type: Article

References (14)

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4. Amato Ivan. Formenting a revolution, in miniature. Science, 1998,282:402-405
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7. Takaaki Kawaguchi, Hiroshi Matsukawa. Static and dynamic properties of frictional phenomena in a one-dimensional system with randomness. Physical Review B, 1997,56:4261-4265
8. Stark K C, Mehregany M, Philips S M. Analysis of gear tooth performance of mechanically-coupled, outer-rotor polysilicon micromotors. In: Bhushan B ed.Proceeding of Tribology Issues and Opportunities in MEMS, Ohio, 1997,403-406
9. John A T. Rheological modeling of thin film lubrication. In: Bhushan B ed. Proceeding of Tribology Issues and Opportunities in MEMS, Ohio, 1997,175-184
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11. Jensen B D, Howell L L, Salmon L G. Introduction of twin-link, in-plane bistable compliant MEMS. In: Proceedings of the 1998 ASME Technical Conferences, DETC98/MECH-5837