New detection method for capacitive micromachined ultrasonic transducers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 1998, Pages 1007-1010

  Ergun, A Sanli ^a   Temelkuran, Burak ^a   Ozbay, Ekmel ^a   Atalar, Abdullah ^a  

^a BILKENT UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; NONDESTRUCTIVE EXAMINATION; ULTRASONIC MEASUREMENT; ULTRASONIC TESTING; VIBRATIONS (MECHANICAL);

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUT); DISPLACEMENT SENSING; ULTRASONIC DETECTION;

ULTRASONIC TRANSDUCERS;

EID: 0032273893     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)