Shuffle motor: a high force, high precision linear electrostatic stepper motor

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 777-780

  Tas, Niels ^a   Wissink, Jeroen ^a   Sander, Louis ^a   Lammerink, Theo ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATIC DEVICES; EQUIPMENT TESTING; MODEL STRUCTURES; STEPPING MOTORS; TRANSDUCERS; VOLTAGE MEASUREMENT;

DRIVING VOLTAGE; LINEAR ELECTROSTATIC STEPPER MOTOR; MECHANICAL TRANSFORMATION; SHUFFLE MOTOR; SURFACE MICROMACHINING;

ELECTRIC MOTORS;

EID: 0030685231     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)