Rotary electrostatic micromotor 1×8 optical switch

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 116-120

  Yasseen, A A ^a   Mitchell, J ^a   Streit, T ^a   Smith, D A ^a   Mehregany, M ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; GRADIENT INDEX OPTICS; LENSES; MIRRORS; OPTICAL COMMUNICATION EQUIPMENT; OPTICAL SWITCHES; REACTIVE ION ETCHING;

ROTARY ELECTROSTATIC MICROMOTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031681677     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)