Design and fabrication of an angular microactuator for magnetic disk drives

Journal of Microelectromechanical Systems

Volumn 7, Issue 2, 1998, Pages 141-147

  Horsley, David A ^a   Cohn, Michael B ^a   Singh, Angad ^a   Horowitz, Roberto ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Disk drive; Electrostatic actuator; HexSil; Microfabrication; Polysilicon; Servo control

Indexed keywords

ACTUATORS; CHEMICAL VAPOR DEPOSITION; ELECTROSTATIC DEVICES; MAGNETIC DISK STORAGE; PLASMA ETCHING; POLYSILANES; SERVOMECHANISMS; SOLDERING;

ANGULAR ELECTROSTATIC MICROACTUATORS; HEXSIL PROCESS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032099010     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.679333     Document Type: Article

References (13)

1. E. Grochowski and R. F. Hoyt, "Future trends in hard disk drives," IEEE Trans. Magn., vol. 32, no. 6, pt. 1, pp. 1850-1854, 1996.
2. K. Takaishi et al., "Microactuator control for disk drive," IEEE Trans. Magn., vol. 32, no. 3, pt. 2, pp. 1863-1866, 1996.
3. S. Koganezawa, K. Takaishi, Y. Mizoshita, Y. Uematsu, and T. Yamada, "Development of an integrated piggyback milli-actuator for high density magnetic recording," in Int. Conf. Micromechatronics for Information and Precision Equipment, Tokyo, Japan, July 1997.
4. S. Nakamura, K. Suzuki, M. Ataka, and H. Fujita, "An electrostatic micro actuator for a magnetic head tracking system of hard disk drives," in 9th Int. Conf. Solid-State Sensors and Actuators (Transducers'97), Chicago, IL, June 1997, pp. 1081-1084.
5. T. Imamura, T. Koshikawa, and M. Katayama, "Transverse mode electrostatic microactuator for MEMS-Based HDD Slider," in IEEE Proc. 9th Int. Workshop on Micro Electro Mechanical Syst., San Diego, CA, Feb. 1996, pp. 216-221.
6. L.-S. Fan, H. H. Ottesen, T. C. Reiley, and R. W. Wood, "Magnetic recording-head positioning at very high track densities using a microactuator-based, two-stage servo system," IEEE Trans. Ind. Electron., vol. 42, no. 3, pp. 222-233, 1995.
7. W. Tang, V. Temesvary, R. Miller, A. Desai, Y. C. Tai, and D. K. Miu, "Silicon micromachined electromagnetic microactuators for rigid disk drives," IEEE Trans. Magn., vol. 31, no. 6, pp. 2964-2966, 1995.
8. W. N. Sharpe, Jr., B. Yuan, and R. Vaidyanathan, "Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon," in IEEE Proc. 10th Int. Workshop on Micro Electro Mechanical Syst., Nagoya, Japan, Feb. 1997, pp. 424-429.
9. S. K. Aggarwal, D. A. Horsley, R. Horowitz, and A. Pisano, "Microactuators for high density disk drives," in Proc. Am. Control Conf., Albuquerque, NM, June, 1997, pp. 3979-3084.
10. P. Cheung, R. Horowitz, and R. T. Howe, "Design, fabrication, position sensing, and control of an electrostatically-driven polysilicon microactuator," IEEE Trans. Magn., vol. 32, no. 1, pp. 122-128, 1996.
11. C. G. Keller and M. Ferrari, "Milli-scale polysilicon structures," in IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 1994, pp. 132-137.
12. A. Singh, D. A. Horsley, M. B. Cohn, A. P. Pisano, and R. T. Howe, "Batch transfer of microstructures using flip-chip solder bump bonding," in 9th Int. Conf. Solid-State Sensors and Actuators (Transducers'97), June 1997, pp. 265-268.
13. M. B. Cohn, Y. Liang, R. T. Howe, and A. P. Pisano, "Wafer-to-wafer transfer of microstructures for vacuum packaging," in 1996 IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June, pp. 32-35.