Single mask, large force, and large displacement electrostatic linear inchworm motors

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 260-264

  Yeh, R ^a   Hollar, S ^a   Pister, K S J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; ENERGY EFFICIENCY; FORCE CONTROL; LINEAR MOTORS; MASKS; SILICON ON INSULATOR TECHNOLOGY; STICTION;

ELECTROSTATIC LINEAR INCHWORM MOTORS;

ACTUATORS;

EID: 0035016487     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)