Synthesis and characterization of porous polymeric low dielectric constant films

Journal of Electronic Materials

Volumn 30, Issue 4, 2001, Pages 309-313

  Xu, Yuhuan ^a   Zheng, D W ^a   Tsai, Yipin ^a   Tu, K N ^a   Zhao, Bin ^b   Liu, Q Z ^b   Brongo, Maureen ^b   Ong, Chung Wo ^c   Choy, Chung Loong ^c   Sheng, George T T ^d   Tung, C H ^d  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Conexant Systems ^*  (United States)

^c HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^d INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Poly(arylene) ethers; Porous polymer film; Ultra low dielectric constant

Indexed keywords

EVAPORATION; FABRICATION; MICROELECTRONICS; MIM DEVICES; OPTICAL MICROSCOPY; PERMITTIVITY; PHASE SEPARATION; PLASTIC FILMS; POROSITY; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; THERMAL EXPANSION;

INTERLAYER DIELECTRIC (ILD) MATERIALS; ORGANIC PHASE SEPARATION; POROUS POLYMER FILMS;

DIELECTRIC FILMS;

EID: 0035306609     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-001-0036-9     Document Type: Article

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