Mechanical property measurement of thin polymeric-low dielectric-constant films using bulge testing method

Applied Physics Letters

Volumn 76, Issue 15, 2000, Pages 2008-2010

  Zheng, D W ^a,d   Xu, Y H ^a   Tsai, Y P ^a   Tu, K N ^a   Patterson, P ^b   Zhao, Bin ^c   Liu, Q Z ^c   Brongo, Maureen ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California   (United States)

^c Rockwell Semiconductor Systems   (United States)

^d INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001005321     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.126237     Document Type: Article

References (15)

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