Finite element simulator for three-dimensional analysis of interconnect structures

Microelectronics Journal

Volumn 32, Issue 2, 2001, Pages 163-171

  Sabelka, R ^a   Selberherr, S ^a  

^a INSTITUTE FOR MICROELECTRONICS   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; CROSSTALK; ELECTRIC CURRENTS; ELECTRIC RESISTANCE; ELECTROSTATICS; FINITE ELEMENT METHOD; HEAT CONDUCTION; PARTIAL DIFFERENTIAL EQUATIONS; TEMPERATURE DISTRIBUTION;

ELECTROTHERMAL SIMULATION; EULER EQUATION; POISSON EQUATION;

ULSI CIRCUITS;

EID: 0035254362     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(00)00113-0     Document Type: Article

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