Multi layer metallization

European Solid-State Device Research Conference

Volumn , Issue , 1997, Pages 42-48

  Lerme, Michel ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; SILICON OXIDES;

CIRCUIT DENSITY; DESIGN AND TECHNOLOGY; INTERCONNECT PERFORMANCE; SCALING DOWN;

INTEGRATED CIRCUIT INTERCONNECTS;

EID: 0006414852     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.1997.194378     Document Type: Conference Paper

References (15)

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