Thin film morphology at low adatom mobility

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4467, Issue 1, 2001, Pages 87-101

  Knepper, Robert ^a   Messier, Russell ^a  

^a The Pennsylvania State University   (United States)

Author keywords

Columnar thin films; Low adatom mobility; Thin film morphology

Indexed keywords

ATOMS; CHEMICAL VAPOR DEPOSITION; FILM PREPARATION; ION BOMBARDMENT; MORPHOLOGY; OPTICAL COATINGS; PHYSICAL VAPOR DEPOSITION;

COLUMNAR THIN FILMS; HARD COATINGS; HIERARCHICAL CLUSTERS; LOW ADATOM MOBILITY;

THIN FILMS;

EID: 0034769792     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.432957     Document Type: Article

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