AFM helps engineer low-scatter thin films

Laser Focus World

Volumn 34, Issue 4, 1998, Pages 147-152

  Duparré, Angela ^a   Kaiser, Norbert ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIELECTRIC FILMS; FOURIER TRANSFORMS; MICROSTRUCTURE; MORPHOLOGY; OPTICAL COATINGS; SUBSTRATES; SURFACES;

FLUORIDE COATINGS; POWER SPECTRAL DENSITY MEASUREMENT; THIN FILM MICROSTRUCTURE;

THIN FILMS;

EID: 0032049109     PISSN: 10438092     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (4)

1. N. Kaiser et al., Proc. SPIE 3057, 940 (1997).
2. A. Duparré, "Light scattering of thin dielectric films," Thin films for optical coatings, R. Hummel and K. Guenther, eds., CRC Press, Boca Raton, FL, p. 273 (1995).
3. J. M. Bennett and L. Mattsson, Introduction to surface roughness and scattering, Optical Society of America, Washington, DC (1993).
4. A. Duparré and S. Gliech, Proc. SPIE 3141, 57 (1997).