Morphology and mechanical properties of oblique angle columnar thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4097, Issue , 2000, Pages 291-298

  Knepper, Robert ^a   Messier, Russell ^a  

^a Materials Research Lab   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; ANISOTROPY; ATOMIC FORCE MICROSCOPY; DEPOSITION; MATHEMATICAL MODELS; MORPHOLOGY; RESIDUAL STRESSES; SURFACES;

ANGLE OF VAPOR INCIDENCE; COLUMNAR THIN FILMS; POWER SPECTRAL DENSITY ANALYSIS;

THIN FILMS;

EID: 0033684126     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (28)