Laser-induced fluorescence measurement of metastable chlorine ion temperature in time-modulated inductively coupled plasma

Journal of the Electrochemical Society

Volumn 147, Issue 8, 2000, Pages 3070-3073

  Kumagai, S ^a   Sasaki, M ^a   Koyanagi, M ^a   Hane, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; DENSITY (SPECIFIC GRAVITY); FLUORESCENCE; SEMICONDUCTOR PLASMAS;

INDUCTIVELY COUPLED PLASMAS; TIME-RESOLVED LASER-INDUCED FLUORESCENCE METHODS;

PLASMA ETCHING;

EID: 0034250063     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393856     Document Type: Article

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