Laser-induced fluorescence and Langmuir probe determination of Cl+2 and Cl+ absolute densities in transformer-coupled chlorine plasmas

Applied Physics Letters

Volumn 74, Issue 12, 1999, Pages 1666-1668

  Malyshev, M V ^a,c   Fuller, N C M ^a,b   Bogart, K H A ^a   Donnelly, V M ^a   Herman, Irving P ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b Columbia University ^*  (United States)

^c PRINCETON PLASMA PHYSICS LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE; EMISSION SPECTROSCOPY; FLUORESCENCE; LASER BEAM EFFECTS; PLASMA ETCHING; POSITIVE IONS; REACTIVE ION ETCHING;

EXCITATION SPECTROSCOPY; INDUCTIVELY-COUPLED PLASMAS (ICP); LANGMUIR PROBES; LASER-INDUCED FLUORESCENCE (LIF); TRANSFORMER-COUPLED PLASMAS;

PLASMAS;

EID: 0032614967     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123648     Document Type: Article

References (11)

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