Characterization of pulse-modulated inductively coupled plasmas in argon and chlorine

Journal of Applied Physics

Volumn 82, Issue 6, 1997, Pages 2814-2821

  Hebner, G A ^a   Fleddermann, C B ^a,b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b University of New Mexico   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000405605     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366277     Document Type: Article

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