Detection of metastable chlorine ions in time-modulated plasma by time resolved laser-induced fluorescence

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 B, 1999, Pages 7126-7130

  Kumagai, Shinya ^a   Sasaki, Minoru ^a   Koyanagi, Mitsumasa ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Chlorine plasma; Etching; Laser induced fluorescence; Metastable chlorine ion; Time modulated plasma

Indexed keywords

CHLORINE; DENSITY MEASUREMENT (OPTICAL); DIFFUSION IN GASES; FLUORESCENCE; LASER APPLICATIONS; POSITIVE IONS;

LASER-INDUCED FLUORESCENCE; TIME-MODULATED PLASMA;

PLASMA ETCHING;

EID: 0033326085     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.7126     Document Type: Article

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