Low-loss fiber-matched low-temperature PECVD waveguides with small-core dimensions for optical communication systems

IEEE Photonics Technology Letters

Volumn 9, Issue 9, 1997, Pages 1238-1240

  Hoffmann, Martin ^a   Kopka, Peter ^a   Voges, Edgar ^a  

^a TU DORTMUND UNIVERSITY   (Germany)

Author keywords

Integrated optics; Optical materials devices; Optical planar waveguide components; Optical planar waveguides; Optical strip waveguide components; Optical switches; Optical waveguides; Silicon materials devices

Indexed keywords

BIREFRINGENCE; CHEMICAL VAPOR DEPOSITION; INTEGRATED OPTICS; OPTICAL COMMUNICATION; OPTICAL SWITCHES; REACTIVE ION ETCHING; REFRACTIVE INDEX; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE TESTING; SILICA;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD);

OPTICAL WAVEGUIDES;

EID: 0031234208     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.618490     Document Type: Article

References (9)

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