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Volumn 33, Issue 10, 1997, Pages 861-863
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Directly UV written silica-on-silicon planar waveguides with low loss
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Author keywords
Integrated optics; Optical waveguides; Planar waveguides
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Indexed keywords
CONTINUOUS WAVE LASERS;
ELECTRON DEVICE MANUFACTURE;
INTEGRATED OPTICS;
LASER BEAMS;
PHOTOLITHOGRAPHY;
REACTIVE ION ETCHING;
THIN FILMS;
PHOTOSENSITIVE THIN FILMS;
PLANAR WAVEGUIDES;
OPTICAL WAVEGUIDES;
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EID: 0031559280
PISSN: 00135194
EISSN: None
Source Type: Journal
DOI: 10.1049/el:19970602 Document Type: Article |
Times cited : (49)
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References (5)
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