Vacuum ultraviolet and visible optical emission spectra from laser ablation of graphite at 193 nm: Application to carbon nitride thin films deposition

Materials Research Society Symposium - Proceedings

Volumn 526, Issue , 1998, Pages 337-342

  Henck, R ^a   Fuchs, C ^a   Fogarassy, E ^a   Hommet, J ^a   Le Normand, F ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; EMISSION SPECTROSCOPY; LASER ABLATION; NITRIDES; NITROGEN; PRESSURE EFFECTS; PULSED LASER APPLICATIONS; THIN FILMS; ULTRAVIOLET SPECTROSCOPY; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE;

GRAPHITE;

EID: 0032308607     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-526-337     Document Type: Conference Paper

References (16)