Studies of carbon nitride thin films synthesized by KrF excimer ablation of graphite in nitrogen atmosphere

Materials Research Society Symposium - Proceedings

Volumn 526, Issue , 1998, Pages 343-348

  Ren, Z M ^a   Lu, Y F ^a   Song, W D ^a   Chan, D S H ^a   Low, T S ^a   Gamani, K ^a   Chen, G ^a   Li, K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; DEPOSITION; ENERGY GAP; EXCIMER LASERS; LASER ABLATION; NITRIDES; NITROGEN; OPTICAL PROPERTIES; PRESSURE EFFECTS; PULSED LASER APPLICATIONS; SILICON WAFERS; THIN FILMS;

CARBON NITRIDE;

GRAPHITE;

EID: 0032315469     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-526-343     Document Type: Conference Paper

References (22)