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Volumn 4, Issue 1, 1997, Pages 44-48
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Challenges in commercializing MEMS
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Author keywords
[No Author keywords available]
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Indexed keywords
DIGITAL CIRCUITS;
MARKETING;
MECHANICAL PROPERTIES;
MOS DEVICES;
SEMICONDUCTOR DEVICE MANUFACTURE;
VLSI CIRCUITS;
XEROGRAPHY;
THERMAL INKJET (TIJ) PRINTING;
MICROELECTROMECHANICAL DEVICES;
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EID: 0030711939
PISSN: 10709924
EISSN: None
Source Type: Journal
DOI: 10.1109/99.590855 Document Type: Article |
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Times cited : (16)
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References (8)
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