Ciliary microactuator array for scanning electron microscope positioning stage

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1998-2002

  Darling, Robert B ^a   Suh, John W ^b   Kovacs, Gregory T A ^a,b  

^a University of Washington   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DRIVE SIGNAL; ELECTRICAL INPUTS; ELECTRICAL INTERFERENCE; ELECTRONIC CONTROLS; ELECTROSTATIC ACTUATION; FEED THROUGH; GROUND PLANES; LONG-TRAVEL; LOW POWER; MICRON SCALE; MULTI-CONDUCTOR; OBJECT MOTION; POSITIONING STAGE; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPES; SEM; THERMAL ACTUATION; THERMAL ISOLATION; VACUUM CHAMBERS;

ACTUATORS; ELECTRON BEAMS; ELECTRON MICROSCOPES; ELECTRONICS INDUSTRY; ELECTROSTATIC ACTUATORS; GOLD COATINGS; POLYIMIDES; POWER ELECTRONICS; SCANNING; SCANNING ELECTRON MICROSCOPY;

ELECTRONS;

EID: 22044458149     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581209     Document Type: Article

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