Distributed MEMS: New challenges for computation

IEEE computational science & engineering

Volumn 4, Issue 1, 1997, Pages 12-16

  Berlin, Andrew A ^a   Gabriel, Kaigham J ^a  

^a XEROX CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTED MICROELECTROMECHANICAL DEVICES; MULTIPLICITY;

ACTUATORS; BANDWIDTH; COMPUTATIONAL METHODS; COMPUTER AIDED DESIGN; DISTRIBUTED PARAMETER CONTROL SYSTEMS; MICROELECTRONIC PROCESSING; MICROMACHINING; NATURAL FREQUENCIES; PARALLEL PROCESSING SYSTEMS; SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030677071     PISSN: 10709924     EISSN: None     Source Type: Journal    
DOI: 10.1109/99.590851     Document Type: Article

References (0)