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Volumn 11, Issue 4, 1993, Pages 1301-1306
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Transformer Coupled Plasma Etch Technology for the Fabrication of Subhalf Micron Structures
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 21144465075
PISSN: 07342101
EISSN: 15208559
Source Type: Journal
DOI: 10.1116/1.578543 Document Type: Conference Paper |
Times cited : (71)
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References (21)
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