Modelling of inductively coupled discharges with internal and external coils

Plasma Sources Science and Technology

Volumn 1, Issue 1, 1992, Pages 67-73

  Lister, G G ^a   Cox, M ^b  

^a Thorn EMI Central Res Labs ^*  (United Kingdom)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5544309074     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/1/1/008     Document Type: Article

References (20)

1. Eigenmode electric field profiles in cylindrical plasmas
2. Development of rf plasma generators for neutral beams
3. Numerical simulation of the RF ion source RIG-10
4. The Starting Mechanism of the First Stage of the Ring Discharge
5. The Growth of the High-Frequency Electrodeless Discharge