A simple analysis of an inductive RF discharge

Plasma Sources Science and Technology

Volumn 1, Issue 3, 1992, Pages 179-186

  Piejak, R B ^a   Godyak, V A ^a   Alexandrovich, B M ^a  

^a VERIZON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001235209     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/1/3/006     Document Type: Article

References (8)