Residual stress in sputtered gold films on quartz measured by the cantilever beam deflection technique

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 46, Issue 4, 1999, Pages 981-992

  Thornell, Greger ^a   Ericson, Fredric ^a   Hedlund, Christer ^a   Ohrmalm, Johan ^a   Schweitz, Jan Ake ^a   Portnoff, Guy ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; ELECTRODES; GOLD; MORPHOLOGY; QUARTZ APPLICATIONS; RESIDUAL STRESSES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING FILMS; SPUTTERING; STRESS RELAXATION; TENSILE STRESS; TRANSMISSION ELECTRON MICROSCOPY;

CANTILEVER BEAM DEFLECTION TECHNIQUE; FREQUENCY SHIFT; GOLD FILMS;

CRYSTAL RESONATORS;

EID: 0032643990     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.775665     Document Type: Article

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