Resistivity and adhesive strength of thin film metallizations on single crystal quartz

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 44, Issue 2, 1997, Pages 237-249

  Vianco, Paul T ^a   Sifford, Catherine H ^a   Romero, Juan A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; CHROMIUM; ELECTRIC CONDUCTIVITY OF SOLIDS; GOLD; INTERDIFFUSION (SOLIDS); MOLYBDENUM; NICKEL; QUARTZ; SINGLE CRYSTALS; SUBSTRATES;

MEAN ADHESIVE STRENGTH; THIN FILM METALLIZATIONS;

THIN FILMS;

EID: 0031095167     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.585109     Document Type: Article

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