Stress-related effects in thin films

Thin Solid Films

Volumn 171, Issue 1, 1989, Pages 5-31

  Thornton, John A ^a   Hoffman, D W ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b FORD MOTOR COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METALS AND ALLOYS--THIN FILMS; SPUTTERING; STRESSES--THERMAL;

INTERNAL STRESSES; THERMAL EXPANSION COEFFICIENTS;

FILMS;

EID: 0024641687     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(89)90030-8     Document Type: Article

References (41)

1. Mechanical properties of thin films
2. The mechanical properties of non-metallic thin films
3. The mechanical properties of thin condensed films
4. High rate thick film growth
5. A model of deadherence due to stresses in an elastic film
6. Stress relief and hillock formation in thin lead films
7. Mechanisms of stress relief in polycrystalline films
8. Hillock growth in thin films
9. Recent developments in the study of mechanical properties of thin films
10. Stresses in thin films: the relevance of grain boundaries and impurities
11. Effect of impurities on intrinsic stress in thin films
12. Intrinsic stress in evaporated metal films
13. Internal stresses
14. Internal stresses in sputtered chromium
15. Internal stresses in titanium nickel molybdenum and tantalum films deposited by cylindrical magnetron sputtering
16. The compressive stress transition in Al, V, Zr, Nb, and W metal films sputtered at low working pressures
17. Effects of substrate orientation and rotation on internal stresses in sputtered metal films
18. Internal stresses in metallic films deposited by cylindrical magnetron sputtering
19. Magnetron sputtering: basic physics and application to cylindrical magnetrons
20. Cylindrical magnetron sputtering
21. Some measurements of stress in thin films prepared by low pressure triode sputtering
22. Effect of ion bombardment during deposition on thick metal and ceramic deposits
23. Reflection of noble gas ions at solid surfaces
24. Gas incorporation into sputtered films
25. Argon concentration in tungsten films deposited by dc sputtering
26. Argon entrapment in metal films by dc triode sputtering
27. Scattering of low-energy noble gas ions from metal surfaces
28. Ion scattering spectroscopy below 10 keV
29. Ion reflection from a single crystal
30. The ionic entrapment and thermal desorption of inert gases in tungsten for kinetic energies of 40 eV to 5 keV
31. Stress and resistivity control in sputtered molybdenum films and comparison with sputtered gold
32. The nature of physical sputtering
33. Decorative metallizing by magnetron sputtering: effects of geometry on film properties
34. Columnar microstructure in vapor-deposited thin films
35. Simulation of structural anisotropy and void formation in amorphous thin films