Three-dimensional elastic-plastic fractal analysis of surface adhesion in microelectromechanical systems

Journal of Tribology

Volumn 120, Issue 4, 1998, Pages 808-813

  Komvopoulos, K ^a   Yan, W ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC-PLASTIC FRACTAL ANALYSIS; SURFACE ADHESION;

ALUMINUM; COMPUTER SIMULATION; DEFORMATION; ELASTOPLASTICITY; FRACTALS; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; SILICON; STICTION; STIFFNESS; SURFACE ROUGHNESS;

ADHESION;

MACHINING;

EID: 0032194506     PISSN: 07424787     EISSN: 15288897     Source Type: Journal    
DOI: 10.1115/1.2833783     Document Type: Article

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