Carbon nitride films synthesized by dual ion beam sputtering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 122, Issue 3, 1997, Pages 534-537

  Prieto, P ^a   Quiros C ^a   Elizalde, E ^a   Fernandez, A ^b   Martin, J M ^c   Sanz, J M ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^b INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

^c ECOLE CENTRALE DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ARGON; CHEMICAL BONDS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; ION BOMBARDMENT; NITRIDES; SPUTTER DEPOSITION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS; DUAL ION BEAM SPUTTERING;

CARBON INORGANIC COMPOUNDS;

EID: 0031546585     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00566-6     Document Type: Article

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