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Volumn , Issue , 1989, Pages 60-65
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One-port active polysilicon resonant microstructures.
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTALS--MICROSTRUCTURE;
SEMICONDUCTOR DEVICES, MOS;
ON-CHIP NMOS;
POLYSILICON;
RAPID THERMAL ANNEALING;
RESIDUAL STRAIN;
STRAIN-RELIEF TECHNIQUE;
SEMICONDUCTING SILICON;
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EID: 0024863150
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (34)
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References (15)
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