Mechanical integrity of polysilicon films exposed to hydrofluoric acid solutions

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 56-60

  Walker, J A ^a   Gabriel, K J ^a   Mehregany, M ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL; HYDROFLUORIC ACID--SOLUTIONS; MEMBRANES--MECHANICAL PROPERTIES;

MECHANICAL INTEGRITY; POLYSILICON FILMS; POLYSILICON MICROMECHANISMS; SURFACE MICROMACHINING;

SEMICONDUCTING FILMS;

EID: 0025603567     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)