Measurement of Young's modulus on microfabricated structures using a surface profiler

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 147-152

  Tai, Yu Chong ^a   Muller, Richard S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY--MEASUREMENTS; MICROELECTRONICS--MICROSTRUCTURE; SEMICONDUCTING FILMS--MEASUREMENTS; SURFACES--MEASUREMENTS;

MICROBRIDGE; MICROFABRICATED STRUCTURES; SURFACE PROFILER; THIN FILM MATERIALS; YOUNG'S MODULUS;

SUBSTRATES;

EID: 0025644073     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)