Micromechanical structures for thin film characterization

Transducers '91

Volumn , Issue , 1991, Pages 205-208

  Pratt, R I ^a   Johnson, G C ^a   Howe, R T ^a   Chang, J C ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL; SEMICONDUCTING SILICON - CHEMICAL VAPOR DEPOSITION; VIBRATIONS - ANALYSIS;

LATERAL VIBRATIONS; LINEAR RESPONSE; LPCVD POLYCRYSTALLINE SILICON; MICROMECHANICAL STRUCTURES; NONLINEAR RESPONSE; STIFFENING SPRING;

SEMICONDUCTING FILMS;

EID: 0026382037     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)