Surface morphology of p-type (100) silicon etched in aqueous alkaline solution

Journal of the Electrochemical Society

Volumn 143, Issue 5, 1996, Pages 1744-1750

  Bressers, P M M C ^a   Kelly, J J ^a   Gardeniers, J G E ^b   Elwenspoek, M ^b  

^a UTRECHT UNIVERSITY   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

AGENTS; ANISOTROPY; ELECTROCHEMISTRY; ETCHING; MORPHOLOGY; SOLUTIONS; SURFACE STRUCTURE; SURFACES;

FERRICYANIDE; OXIDIZING AGENT; PYRAMIDAL HILLOCKS; PYRAMIDS;

SEMICONDUCTING SILICON;

EID: 0030145363     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1836710     Document Type: Article

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