Fabrication of multiple-level electrically isolated high-aspect-ratio single crystal silicon microstructures

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 460-464

  Hofmann, Wolfgang ^a   MacDonald, Noel C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CRYSTAL MICROSTRUCTURE; ELECTRON GUNS; ELECTROSTATIC LENSES; LITHOGRAPHY; METALLIZING; MICROMACHINING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SINGLE CRYSTALS; SURFACE ROUGHNESS;

ELECTROSTATIC MICROLENSES;

MICROELECTROMECHANICAL DEVICES;

EID: 0030676703     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)