Fabrication of microlenses by combining silicon technology, mechanical micromachining and plastic molding

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2687, Issue , 1996, Pages 18-22

  Koehler, Uwe ^a   Guber, Andreas E ^a   Bier, W ^a   Heckele, M ^a   Schaller, Thomas ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EMBOSSING; MICROLENSES; PLASMALESS ISOTROPIC ETCHING;

DIAMOND CUTTING TOOLS; ETCHING; MASKS; MICROMACHINING; NUMERICAL CONTROL SYSTEMS; PLASTIC PRODUCTS; SILICON;

LENSES;

EID: 0029696877     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)