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Volumn 45, Issue 5, 1998, Pages 1122-1126

Monte carlo simulation of electron transport properties in extremely thin SOI MOSFET's

Author keywords

MOS devices; Silicon on insulator technology

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTRON SCATTERING; ELECTRON TRANSPORT PROPERTIES; INTERFACES (MATERIALS); MONTE CARLO METHODS; MOSFET DEVICES; PHONONS; QUANTUM THEORY; SURFACE ROUGHNESS; THIN FILM DEVICES;

EID: 0032072525     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.669557     Document Type: Article
Times cited : (76)

References (19)
  • 5
    • 33746189368 scopus 로고    scopus 로고
    • "0. l-μm-gate, ultrathinfilm CMOS devices using SIMOX substrate with 80-nm-thick buried oxide layer" in
    • Y. Omura, S. Nakashima, K. Izumi, and T. Ishii, "0. l-μm-gate, ultrathinfilm CMOS devices using SIMOX substrate with 80-nm-thick buried oxide layer" in IEDM Tech. Dig., 1991, p. 675.
    • IEDM Tech. Dig., 1991, P. 675.
    • Omura, Y.1    Nakashima, S.2    Izumi, K.3    Ishii, T.4
  • 6
    • 0030173467 scopus 로고    scopus 로고
    • "Quantum mechanical influences on shortchannel in ultra-thin MOSFET/SIMOX devices,"
    • 17, pp. 300-302, June 1996.
    • Y. Omura and K. Izumi, "Quantum mechanical influences on shortchannel in ultra-thin MOSFET/SIMOX devices," IEEE Electron Devices Lett., 17, pp. 300-302, June 1996.
    • IEEE Electron Devices Lett.
    • Omura, Y.1    Izumi, K.2
  • 7
    • 0029403828 scopus 로고    scopus 로고
    • "Electron mobility behavior in extremely thin SOI MOSFET's,"
    • 18, pp. 527-529, Nov. 1995.
    • J. H. Choi, Y. Park, and H. Min, "Electron mobility behavior in extremely thin SOI MOSFET's," IEEE Electron Device Lett., 18, pp. 527-529, Nov. 1995.
    • IEEE Electron Device Lett.
    • Choi, J.H.1    Park, Y.2    Min, H.3
  • 9
    • 0027886706 scopus 로고    scopus 로고
    • "Quantum-mechanical effects on the threshold voltage of ultrathin-SOI nMOSFET's,"
    • 14, pp. 569-571, Oct. 1993.
    • Y. Omura, S. Horiguchi, M. Tabe, and K. Kishi, "Quantum-mechanical effects on the threshold voltage of ultrathin-SOI nMOSFET's," IEEE Electron Device Lett., 14, pp. 569-571, Oct. 1993.
    • IEEE Electron Device Lett.
    • Omura, Y.1    Horiguchi, S.2    Tabe, M.3    Kishi, K.4
  • 10
    • 0001138836 scopus 로고    scopus 로고
    • "Self-consistent quantum-mechanical calculations in ultrathin silicon-on-insulator structures,"
    • 76, pp. 5979-5995, 1994.
    • T. Ouisse, "Self-consistent quantum-mechanical calculations in ultrathin silicon-on-insulator structures," J. Appl. Phys., 76, pp. 5979-5995, 1994.
    • J. Appl. Phys.
    • Ouisse, T.1
  • 11
    • 85032069152 scopus 로고    scopus 로고
    • "Electronic properties of twodimensional systems,"
    • 54, p. 437, 1982.
    • T. Ando, A. B. Fowler, and F. Stern, "Electronic properties of twodimensional systems," Rev. Mod. Phys., 54, p. 437, 1982.
    • Rev. Mod. Phys.
    • Ando, T.1    Fowler, A.B.2    Stern, F.3
  • 12
    • 4243227379 scopus 로고    scopus 로고
    • "Monte Carlo study of electron transport in silicon inversion layers,"
    • B48, p. 2244, 1993.
    • M. V. Fischetti and S. E. Eaux, "Monte Carlo study of electron transport in silicon inversion layers," Phys. Rev., B48, p. 2244, 1993.
    • Phys. Rev.
    • Fischetti, M.V.1    Eaux, S.E.2
  • 13
    • 0001288137 scopus 로고    scopus 로고
    • "Modified Schrödinger equation including nonparabolicity for the study of a two-dimensional electron gas,"
    • B48, p. 1626, 1993.
    • J. A. Eöpez-Villanueva, I. Melchor, P. Cartujo, and J. E. Carceller, "Modified Schrödinger equation including nonparabolicity for the study of a two-dimensional electron gas," Phys. Rev., B48, p. 1626, 1993.
    • Phys. Rev.
    • Eöpez-Villanueva, J.A.1    Melchor, I.2    Cartujo, P.3    Carceller, J.E.4
  • 17
    • 0004999024 scopus 로고    scopus 로고
    • "Two-dimensional electron transport in semiconductor layers-Part I: Phonon scattering,"
    • 133, pp. 217-239, 1981.
    • P. J. Price, "Two-dimensional electron transport in semiconductor layers-Part I: Phonon scattering," Ann. Phys. (USA), 133, pp. 217-239, 1981.
    • Ann. Phys. (USA)
    • Price, P.J.1
  • 19
    • 0000826195 scopus 로고    scopus 로고
    • "The electron-phonon interaction in quasi-two-dimensional semiconductor quantum wells structures,"
    • 15, pp. 5899-5917, 1982.
    • B. K. Ridley, "The electron-phonon interaction in quasi-two-dimensional semiconductor quantum wells structures," J. Appl. Phys. C: Solid State Phys., 15, pp. 5899-5917, 1982.
    • J. Appl. Phys. C: Solid State Phys.
    • Ridley, B.K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.